Oxygen Analysis for Improving Semiconductor Wafer Yield
Nearly all electronics processing involving gases takes place inside chambers that require precise control of the process recipe. As an example, oxygen and hydrogen are frequently used during the annealing process to react with existing layers, creating a new oxide or hydride layer on the surface of an existing thin film.
However, in some parts of the process recipe, oxygen can cause problems. In this case, eliminating atmospheric contamination of the gas-phase chemical reactions becomes a priority. That makes accurate measurement of trace O2 levels, which can also serve as a means to detect atmospheric leaks in the chamber, one of critical process parameters that must to be monitored and recorded. Knowing exactly what the oxygen levels are in the process will give you the information you need to ensure the highest quality and product performance.
That’s where we can help. Our trace O2 high purity analyzers feature a rapid-response zirconium oxide sensor and a measurement range of ppm to percent or ppb to percent O2. With this extremely fast response and high accuracy, these analyzers have the ability to measure O2 through large step changes in concentration and measure ppm concentrations of O2 within seconds after exposure to air.
Another way we can help is with room O2 deficiency monitoring. Nitrogen is the most widely used gas in electronics manufacturing. Although it can be used as a process gas, it is more commonly used for inerting and purging, including large amounts for purging vacuum systems and waste abatement systems. All that N2 can cause unsafe conditions should you have an upset condition.
Our O2 deficiency monitors can help you protect your workers by making certain that breathing air oxygen levels are safe. These percent O2 analyzers will closely monitor your workplace environment for health hazards associated with exposure to unsafe breathing air.
We are well aware of the challenges that you face when it comes to measuring critical process parameters and what it takes to meet your quality and safety goals. Through the expertise of our team, we are able to continue to help businesses operate smarter, safer, and more economically.
Whether you need to more closely monitor oxygen levels in your systems or protect your workers by making certain that breathing air levels are safe, you can rely on us.
Talk to an expert
Get in touch with us and talk to an industry expert. We’d be delighted to help you find the right gas analyzer requirements for your particular needs.